Demonstrational Videos Explain How WaferSense Wireless Sensors Measure Critical Parameters in Semiconductor Fabrication Processes and Equipment
Demonstrational videos explaining how WaferSense wireless metrology devices seamlessly measure critical parameters in semiconductor fabrication processes are available on CyberOptics Semiconductor web site at http://www.cyberopticssemi.com/node/114.

WILSONVILLE, OR, June 09, 2011 /24-7PressRelease/ -- Products in the WaferSense family that are featured in the YouTube videos provide leveling, gapping teaching as well as detection of vibrations and airborne particles in semiconductor process equipment. These wireless measurement systems work together or alone to increase fab effectiveness, fine tune existing equipment and reduce overall cost of operations.
Included in the WaferSense family:
• WaferSense Auto Vibration System: Travels through wafer process areas and reports real-time acceleration data in three axes for engineers to identify vibration sources. http://www.cyberopticssemi.com/products/wafersense/avs/

• WaferSense Airborne Particle Sensor: Monitors airborne particles in process equipment, reporting information in real-time to efficiently validate and analyze wafer contamination. http://www.cyberopticssemi.com/products/wafersense/aps/

• WaferSense Auto Gapping: Measures gaps critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etch. http://www.cyberopticssemi.com/products/wafersense/ags/

• WaferSense Auto Teaching System: Moves through semiconductor equipment to capture three-dimensional offset data for accurate calibration of transfer positions. Also helps find lost or broken wafers to correct portion of the tool. http://www.cyberopticssemi.com/products/wafersense/ats/

• WaferSense Auto Leveling System 2 Vertical: Moves through semiconductor process equipment to take critical 2D level measurements. http://www.cyberopticssemi.com/products/wafersense/als2/

Check out the latest video demos on these products at: http://www.cyberopticssemi.com/node/114

Press Release Contact Information:

Lindsey Diets
CyberOptics Semiconductor
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